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Spectroscopic Ellipsometry measurement in UV to NIR region (0.25-1.2 μm) is carried out to characterize the optical properties of nanometer pt films.The samples are prepared on Si substrate by Ion Beam Sputtering deposition method.The element content is obtained by the MicroXRF Analysis, and a Iorentz oscillator model is used to fitting the Spectroscopic Ellipsometry experimental data.It is found that both the reflectivity and optical constant are sensitive to the variation of film thickness, and the evolution of optical constant trend to stable as the film thickness reach up to about 15nm.