Computational Research of Diamond-like Carbon Coating

来源 :2011年第三届微电子及等离子体技术国际会议 | 被引量 : 0次 | 上传用户：sysbot

【摘要】

：

Diamond-like carbon (DLC) film is composed of different hybrid bonds of carbon,sp2,sp3 and even sp1.Understanding the atomic bond structure would be essential t

【作者】

：

Kwang-Ryeol Lee

【机构】

：

ComputationalScienceCenter,KoreaInstituteofScienceandTechnology,Seoul136-791,Korea

【出处】

：

2011年第三届微电子及等离子体技术国际会议

【发表日期】

：

2011年7期

【关键词】

：

Diamond-like Carbon Ab initio Calculation Molecular Dynamic Simulation Third Ele

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Diamond-like carbon (DLC) film is composed of different hybrid bonds of carbon,sp2,sp3 and even sp1.Understanding the atomic bond structure would be essential to understand their properties and optimize the process parameters.

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Computational Research of Diamond-like Carbon Coating

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