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High-density Plasma Generation with Microwave Propagation along Plasma-Sheath Interface and Its Appl
【机 构】
：
Dept.Mechanical Science and Engineering, Graduate School of Engineering, Nagoya University, Nagoya,
【出 处】
：
The 11th International Workshop on Plasma-Based Ion Implanta
【发表日期】
：
2011年3期
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