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用射频等离子体增强化学气相沉积(RF-PECVD)方法在聚碳酸酯(PC)片上沉积类金刚石(DLC)薄膜,用射频磁控溅射方法制备过渡层以提高膜基结合力及控制光路。本文利用激光拉曼光谱检测薄膜的微观结构,利用X射线光电子能谱分析试样中元素组成,利用扫描电子显微镜观察薄膜的表面形貌,利用摩擦磨损试验机测试薄膜的摩擦学性能,利用紫外-可见光分光光度计研究试样在沉积碳膜后的光学性能。结果表明:利用RF-PECVD方法在PC片上沉积的薄膜为DLC薄膜,试样的摩擦系数与薄膜中sp3百分比有关,其光学特性与薄膜中sp2百分比有关,通过对不同过渡层的研究发现使用Si过渡层对形成高质量高透光率的DLC薄膜更加有利。
A diamond-like carbon (DLC) film was deposited on a polycarbonate (PC) wafer by radio frequency plasma enhanced chemical vapor deposition (RF-PECVD), and a transition layer was fabricated by RF magnetron sputtering to improve film-based adhesion and control the optical path. In this paper, the laser Raman spectroscopy was used to detect the microstructure of the films, the elemental composition of the films was analyzed by X-ray photoelectron spectroscopy, the surface morphology of the films was observed by scanning electron microscopy, the tribological properties of films were tested by friction and wear testing machine, Study on the optical properties of the sample after carbon film deposition by visible light spectrophotometer. The results show that the film deposited on PC sheet by RF-PECVD is DLC film. The friction coefficient of the sample is related to the percentage of sp3 in the film. The optical properties are related to the percentage of sp2 in the film. The transition layer is more advantageous for the formation of DLC films of high quality and high transmittance.