应用色谱—质谱(GC-MS)及裂解色谱-质谱(PGC-MS)测定了乙烯基三甲基硅烷等离子体聚合反应中的气体冷凝物及聚合物,研究推导了等离子体聚合反应历程。单体在气相中被电子撞击,然后扩散到基底,在基底发生链增长和链终止反应。 The gas condensates and polymers in the polymerization of vinyltrimethylsilane were determined by GC-MS and PGC-MS. The history of plasma polymerization was deduced. The monomer is electron impacted in the gas phase and then diffuses to the substrate, causing chain growth and chain termination at the substrate.