ZnO films and ZnO:Cu diluted magnetic semiconductor films were prepared by radio frequency magnetron sputtering on Si(111)substrates,with targets of ZnO and Zn0.99Cu0.01O,respectively.The plasma emission spectra were analyzed by using a grating monochromator during sputtering.The X-ray photoelectron spectroscopy measurements indicate the existence of Zni defect in the films,and the valence state of Cu is 1+.The X-ray diffrac-tion measurements indicate that the thin films have a hexagonal wurtzite structure and have a preferred orientation along the c-axis.The vibrating sample magnetometer measurements indicate that the sample is ferromagnetic at room temperature,and the origin of the magnetic behavior of the samples is discussed. ZnO films and ZnO: Cu diluted magnetic semiconductor films were prepared by radio frequency magnetron sputtering on Si (111) substrates, with targets of ZnO and Zn0.99Cu0.01O, respectively.The plasma emission spectra were analyzed by using a grating monochromator during sputtering The X-ray diffractometry measurements that that thin films have a hexagonal wurtzite structure and have a preferred orientation along the c-axis. The vibrating sample magnetometer measurements indicate that the sample is ferromagnetic at room temperature, and the origin of the magnetic behavior of the samples is discussed.