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光学读出热成像是一种新型的红外成像技术,它基于双材料效应和光学原理实现像转换与像增强,具有高性价比的潜在优势。光学读出热成像焦平面阵列由可动微镜阵列构成,其制作技术是光学读出热成像技术的重要研究内容之一。目前,国内外的研究者已发展了基于表面微机械、体微机械以及表面/体微机械工艺的3种制作技术,前两者各有优缺点,而基于表面/体硅微机械工艺的制作技术则兼顾了前两者的优点。
Optical readout thermal imaging is a new type of infrared imaging technology that offers the potential for cost-effective conversion and image enhancement based on bimaterial effects and optical principles. The optical read-out thermal imaging focal plane array is composed of a movable micromirror array, and its fabrication technology is one of the important research contents of optical readout thermography. Currently, researchers at home and abroad have developed three kinds of fabrication technologies based on surface micromachining, micromachining and surface / micromachining processes, each of which has its own advantages and disadvantages, and the fabrication based on the surface / bulk micromachining process Technology takes into account the advantages of the former two.