在宇航事业的兴起和发展中,精密机械加工起到了重要的作用。但随着技术不断发展,精密加工已不能完全满足要求,所以就产生了超精密加工。 现在我们一般接触到的加工精度是微米级的,它的性质仍然属于精密加工范畴,习惯上称之为微米加工或微英寸加工。由于精密加工处于重要地位,一些技术先进的国家 In the rise and development of aerospace industry, precision machining plays an important role. But with the continuous development of technology, precision machining can not fully meet the requirements, so it produces ultra-precision machining. Now we generally come into contact with the micron-level processing accuracy, its nature still belongs to the scope of precision machining, customarily referred to as micro-processing or micro-inch processing. Due to the importance of precision machining, some technologically advanced countries