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针对实验中9.5μm峰值响应波长的n型长波量子阱红外探测器设计运用二维金属小球(铜)阵列作光耦合结构.金属小球阵列均匀填充在绝缘的胶黏剂中,基于惠更斯原理研究二维金属小球阵列体系的光耦合和光吸收,结果表明对9.5μm响应波长的长波量子阱红外探测器,采用周期为3μm,半径为0.9μm左右的金属小球阵列可以获得最佳的光耦合.优化设计后的量子效率(66%)远高于45°磨角耦合的量子效率(38%),为实验运用金属小球阵列进行长波量子阱红外探测器的光耦合提供了基本的理论依据和详细的优化设计方案.
The n-type longwave quantum well infrared detector designed for the peak response wavelength of 9.5μm was designed as a two-dimensional metal-ball array (Cu) array for optical coupling structure. The metal balllet array was uniformly filled in the insulating adhesive, The principle of optical coupling and optical absorption of two-dimensional metal ball array system is studied. The results show that for the long wavelength quantum well infrared detector with response wavelength of 9.5μm, the optimal array of metal balls with a period of 3μm and a radius of 0.9μm can be obtained The quantum efficiency (66%) after optimized design is much higher than the quantum efficiency (38%) of the coupling angle of 45 °, which provides a basic experiment for the optical coupling of long wave quantum well infrared detector with metal ball array The theoretical basis and detailed optimization design.