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介绍了一种新型气体吸附测量装置.该装置利用压差法测量,采用美国MKS高精度压差传感器来提高测量精度,通过微调泄漏阀控制极小进气量,并且采用间断法与连续法相结合.实验证明,该装置具有很好的可重复性,能获得高分辨率及超低压吸附等温线.
A new type of gas adsorption measuring device is introduced in this paper.Using the differential pressure method, this device uses the MKS high precision differential pressure sensor in the United States to improve the measurement precision, and controls the minimal inlet air volume through the fine adjustment of the leakage valve. The intermittent method and the continuous method are combined Experiments show that the device has good repeatability and can obtain high resolution and ultra low pressure adsorption isotherms.