光栅分光是六十年代发展起来的一门新的分析测试技术。当时对波长范围0.1A～500A的X射线和紫外线光谱学的研究兴趣形成一个高潮,这是由于在此波长范围中,除利用电子探针或X射线荧光作元素分析外,还可进行地球外X射线源,等离子发射,经典的发射和吸收过程,以及化学和原子价态等的分析研究。而在500A—100A波长范围内,衍射光栅几乎 Grating spectroscopy is a new analysis and testing technology developed in the sixties. At that time, the research interest in X-ray and ultraviolet spectroscopy in the wavelength range from 0.1A to 500A formed a climax because in this wavelength range, in addition to the use of electron probe or X-ray fluorescence for elemental analysis, X-ray sources, plasma emission, classical emission and absorption processes, and analytical studies of chemical and atomic valence states. In the 500A-100A wavelength range, the diffraction grating almost