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为了获得高功率高光束质量激光输出,设计并制备了一种780nm波段5发光单元列阵器件,其采用10μm宽窄条形波导,各发光单元中心间距为100μm,填充因子仅为10%。在准连续注入电流由1.2A增加到2.5A条件下,该器件的输出光束侧向光学参量积由0.666mm·mrad增加至0.782mm·mrad。注入电流为2.5A时,该器件实现了单边准连续506mW的高光束质量激光输出。
In order to obtain a high power and high beam quality laser output, a 780 nm band 5 light emitting cell array device is designed and fabricated using a 10 μm wide and narrow strip waveguide with a center spacing of 100 μm and a fill factor of only 10%. When the quasi-continuous injection current is increased from 1.2A to 2.5A, the lateral optical parametric product of the output beam increases from 0.666mm · mrad to 0.782mm · mrad. At 2.5A injection current, the device achieves a high beam-quality laser output of uni-directionally continuous 506mW.