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采用多弧离子镀在304不锈钢基体表面沉积ZrN涂层。利用X射线衍射仪、扫描电子显微镜、纳米压入仪、电化学分析仪等,比较了基片方向对涂层结构、形貌、成分、沉积速率、硬度以及耐腐蚀性的影响。结果表明:基片方向不同会引起晶体择优取向的改变;垂直于靶材的样品表面大颗粒相对较少,但沉积速率只有平行样品的40%～50%;在负偏压条件下,平行于靶材的样品涂层硬度更高,而垂直样品获得更好的耐腐蚀性。
Multi-arc ion plating was used to deposit ZrN coating on the surface of 304 stainless steel substrate. The effects of substrate orientation on the structure, morphology, composition, deposition rate, hardness and corrosion resistance of the coatings were compared using X-ray diffraction, scanning electron microscopy, nanoindentation and electrochemical analyzer. The results show that the different orientations of the substrates lead to the variation of the preferred orientation of the crystal. Large particles are relatively small on the surface of the sample perpendicular to the target, but the deposition rate is only 40% ~ 50% of that of the parallel sample. Under negative bias conditions, The target samples have a higher coating hardness and the vertical samples give better corrosion resistance.