一、概述众所周知,计算机数字图象处理是一门新兴的学科,而集成电路的发展又迫切需要高精度、高可靠性的自动对准系统。为此我们把二者结合起来研制了数字图象自动对准系统。下面简要地从理论上及实验上对本系统作一介绍。二、本系统特点本系统中硅片对准标记即使在低反差、标记工艺变形、残缺以及光学系统造成畸变误差的情况下,也可以通过图象复原、增强、平锐化的手段予以正确对准。这样就在多道光刻过 I. Overview As we all know, computer digital image processing is a new discipline, and the development of integrated circuits and the urgent need for high-precision, high reliability automatic alignment system. To this end we combine the two developed a digital image automatic alignment system. The following briefly from the theoretical and experimental system to make an introduction. Second, the system features The alignment of the silicon wafer in the system mark even in the low contrast, mark the process of deformation, incomplete and distortion caused by the optical system error, but also by image restoration, enhancement, sharpening means correct quasi. This is in multiple lithography