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一前言以电能为热源的高温加热炉,操作简单而且具有清净的气氛,还能够进行精密的温度控制,因为具备这些特长,尽管与重油、瓦斯气等热源相比费用较高,可是在工业上还是得到广泛的使用。特别是近几年,随着电子材料,人工单晶及高纯度、高熔点等材料的发展,需要进行精密的高温处理,因此,对高温电炉的需用量不断增加。
I. INTRODUCTION High-temperature furnaces using electric energy as a heat source are easy to operate and have a clean atmosphere. They are also capable of precise temperature control. These advantages make them cost-effective in comparison with heat sources such as heavy oil and gas, but they are industrially used Still widely used. Especially in recent years, with the development of materials such as electronic materials, artificial single crystal, high purity and high melting point, precise high temperature treatment is required. Therefore, the demand for high temperature electric furnace is constantly increasing.