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本文描述了与InP晶格匹配的In_(1-x)Ga_xAs_yP_(1-y)(对应发射波长为1.5μm)双异质结液相外延生长。讨论了与外延生长有关的几个主要因素,给出了实验结果及用该液相外延生长的晶片所制作的激光器的参数特性。
This paper describes the double heterojunction liquid-phase epitaxial growth of In_ (1-x) Ga_xAs_yP_ (1-y) (corresponding to 1.5μm emission wavelength) lattice-matched with InP. The main factors related to epitaxial growth are discussed. The experimental results and the parametric characteristics of lasers produced by the epitaxial growth of the liquid crystal are given.