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采用溶胶-凝胶工艺在普通玻璃基片上制备了Ag+、A13+共掺ZnO薄膜,通过XRD、紫外分光光度计和金相显微镜等设备,研究了掺杂Ag和Al对半导体ZnO薄膜组织结构和光学性能的影响。结果表明,掺杂Ag和Al对ZnO薄膜结构和光学性能的影响因浓度不同而有差异。Ag+、A13+掺杂浓度为1%时,摩尔比为4∶1;固定Ag+浓度为1.5%,A13+浓度为0.5%;Ag+、A13+浓度为3%,摩尔比为4∶1,提拉次数15次时,ZnO薄膜的结构、透光率最好。
Ag +, A13 + codoped ZnO thin films were prepared on common glass substrates by sol-gel process. The effects of Ag and Al on the structure and optical properties of ZnO thin films were investigated by XRD, UV spectrophotometer and metallographic microscope. The impact of performance. The results show that the effects of Ag and Al doping on the structure and optical properties of ZnO films vary with different concentrations. Ag +, A13 + doped concentration of 1%, the molar ratio of 4: 1; fixed Ag + concentration of 1.5%, A13 + concentration of 0.5%; Ag +, A13 + concentration of 3%, the molar ratio of 4: 1, Times, ZnO film structure, the best light transmittance.