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近二十年内，精密和超精密加工技术对表面质量、性能的评价提出了越来越高的要求，并且希望在三维范围内“完整、全面”地表征表面的形成；而微纳米测量技术、光电子和计算机技术的发展，给三维表面微观形貌的分析奠定了坚实的基础，致使这方面的研究十分活跃．本文旨在对目前几种常见的三维表面测量方法的基本原理、特征及应用范围作一简单的介绍和分析．
Nearly two decades, precision and ultra-precision machining technology for surface quality, performance evaluation put forward higher and higher requirements, and hope in the three-dimensional range “complete, comprehensive” to characterize the formation of the surface; and micro-nano measurement technology, The development of optoelectronics and computer technology has laid a solid foundation for the analysis of three-dimensional surface micro-topography, resulting in very active research in this area. The purpose of this paper is to make a simple introduction and analysis of the basic principles, characteristics and application scope of several common three-dimensional surface measurement methods.