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介绍了AlN薄膜物理性质及制备方法;综述了AlN薄膜作为薄膜电致发光(TFEL)器件发光层的研究现状;对AlN薄膜发光性能的应用前景做了展望。
The physical properties and preparation methods of AlN thin films are introduced. The research status of AlN thin films as light emitting layers for thin film electroluminescent (TFEL) devices is reviewed. The prospect of the application of AlN thin films is also discussed.