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由X射线聚焦透镜联合X射线机形成的X射线微束与平面晶体波长色散位置灵敏谱仪(PSS)构成的高能量分辨率的μ-XRF(micro-X-ray fluorescence)分析实验装置取得初步实验结果在实验中,得到被分析元素的计数率与X射线机功率成线性增长, Ti Kα和 Cr Kα的能量分辨率分别达到 16.6和 23.6 eV并能分辨开不锈钢中 Cr Kβ和 Mn Kα峰,和同步光微束与 PSS结合的结果相比较,表明用这装置实现高能量分辨率的元素分析是可行的.同时讨论了目前存在的问题及解决的可能性。
X-ray focusing lens combined with X-ray machine to form X-ray micro-beam and planar crystal wavelength dispersion position sensitive spectrometer (PSS) consisting of high energy resolution μ-XRF (micro-XRF) Experimental results In the experiment, the count rate of the element to be analyzed is linearly increased with the X-ray machine power. The energy resolution of Ti Kα and Cr Kα are respectively 16.6 and 23.6 eV, and the resolution of Cr Kβ and Mn Kα peak, compared with the result of synchrotron light beam combined with PSS, it is feasible to use this device to realize elemental analysis with high energy resolution. Also discussed the current problems and the possibility of solution.