本文利用日本岛津ASM—SX扫描电镜的波谱仪测定碳氮共渗20Cr钢渗层中碳和氮的浓度分布曲线,并由浓度分布曲线求得渗层深度约为140μm。为精确测定其真实浓度,采用15kV加速电压,0.1μA束流对渗层进行元素全分析,并用Sharp—cs 365P台式计算机定量校 In this paper, the concentration distribution curve of carbon and nitrogen in the infiltration layer of carbonitrided 20Cr steel was determined by the spectrometer of Shimadzu ASM-SX scanning electron microscope. The depth of infiltration layer was about 140μm from the concentration distribution curve. In order to accurately determine its true concentration, elemental analysis of the permeation layer was performed using a 15 kV accelerating voltage, 0.1 μA beam current and quantified using a Sharp-cs 365P benchtop computer