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本文报道了用等离子体增强化学汽相淀积(PECVD)技术淀积TiO_2薄膜,并研究了各种反应条件对薄膜生长的影响。这种TiO_2薄膜对可见光有较高的透光性、将它制成光电极,薄膜具有一定的光电效应,对氢气和酒精有敏感特性。
This paper reports the deposition of TiO_2 films by plasma-enhanced chemical vapor deposition (PECVD) and the effects of various reaction conditions on the film growth. This kind of TiO_2 film has a high transparency to visible light, and it is made into a photoelectrode. The film has a certain photoelectric effect and is sensitive to hydrogen and alcohol.