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量子阱焦平面探测器具有大面阵焦平面探测器重复性和均匀性好、成品率高、成本低等明显的产业化优势,在军民两用领域获得了广泛而重要的应用。为了尽快研制出全国产化高性能量子阱红外焦平面探测器,通过完全正向的器件设计,采用常规光刻和反应离子刻蚀方法,成功研制出87.1%的高占空比320×256长波量子阱焦平面探测器,峰值波长9μm,平均峰值探测率1.6×1010cm·Hz1/2·W-1。第一支样管的噪声等效温差为33.2mK,响应率不均应性8.9%,面阵盲元率1%。在70K温度下获得了1km和4.2km处的建筑物的清晰成像。实验结果充分显示了器件设计的正确性及研制技术的可控性。
Quantum well focal plane detectors with large area array focal plane detectors with good repeatability and uniformity, high yield, low cost obvious industrial advantages, in the military and civilian access to a wide range of important applications. In order to develop a national high-performance quantum well infrared focal plane detector as soon as possible, through the full forward device design, the use of conventional photolithography and reactive ion etching method, successfully developed a high duty cycle of 87.1% 320 × 256 long wave Quantum well focal plane detector with a peak wavelength of 9μm and an average peak detection rate of 1.6 × 1010cm · Hz1 / 2 · W-1. The first sample tube noise equivalent temperature difference of 33.2mK, response rate of 8.9% non-uniformity, surface blind blindness rate of 1%. Clear imaging of buildings at 1km and 4.2km at 70K was obtained. The experimental results fully demonstrate the correctness of the device design and the controllability of the developed technology.