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为了在飞片靶中加入氧化铝隔热层,以提高飞片速度,增大飞片冲击炸药的压力,确保炸药的可靠起爆,利用真空射频磁控溅射法制备了激光驱动复合多层飞片靶中的Al2O3隔热层,在溅射功率238W、溅射气压0.4Pa、Ar气流量30sccm、靶基距11cm条件下,得到Al2O3薄膜的沉积速率为125nm/h,制备的Al2O3薄膜为非晶结构,其表面均匀、致密,没有孔洞等缺陷,为后续复合多层飞片靶的制备提供支持。
In order to add aluminum oxide insulation layer in the flying target, in order to improve the speed of flyer, increase the pressure of fly-blasting explosive and ensure the reliable detonation of explosive, the laser-driven composite multi-layer flying fly-ash In the target Al2O3 coating, the deposition rate of Al2O3 film was 125 nm / h under the conditions of sputtering power of 238 W, sputtering pressure of 0.4 Pa, Ar gas flow rate of 30 sccm and target distance of 11 cm. Crystal structure, the surface is uniform, dense, no holes and other defects for the subsequent preparation of composite multi-layer flying target to provide support.