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为了减少超精密机床中液体静压导轨热变形对机床加工精度的影响,本文建立了液体静压导轨动导轨有限元模型,利用有限元分析软件ANSYS对动导轨在不同工作环境下做不同运动时的热变形进行仿真分析,仿真结果表明,当动导轨做高速变加速运动时,动导轨热变形较大,会对加工精度产生较大影响,为此,提出了降低液体静压导轨热变形的方法。
In order to reduce the impact of the hydrostatic guide rail thermal deformation on the machining accuracy in the ultra-precision machine tool, a finite element model of hydrostatic guide rail is established in this paper. The finite element analysis software ANSYS is used to analyze the dynamic guide rail under different working conditions The simulation results show that when the moving guideway is used to do high-speed and variable-speed moving, the thermal deformation of the moving guideway is larger, which will have a greater impact on the machining accuracy. Therefore, the paper proposes to reduce the thermal deformation of the hydrostatic guideway method.