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阐述大型系统超高真空获得及运行过程检漏工作的几个特点。对结构复杂的真空室，如何使用分子筛吸附泵与氦质谱检漏仪相结合提高检漏灵敏度，极大限度地找出泄漏的位置。还指出大型金属超高真空系统运行过程如何根据溅射离子泵离子流的数据，判断真空系统漏气及寻找漏点的方法。
Describes several features of large-scale system to obtain and run the process of ultra-high vacuum leak detection. For complex vacuum chamber, how to use the molecular sieve adsorption pump and helium mass spectrometer leak detector to improve the sensitivity of the leak detection, to find out the location of the leak to a great extent. Also pointed out how large metal ultra-high vacuum system operation process based on sputter ion pump ion current data to determine the vacuum system leak and find leaks method.