论文部分内容阅读
将聚酰亚胺作为绝热材料,对传统室温微测辐射热计结构进行了改进,成功制备了非晶硅室温微测辐射热计并进行了测试。以聚合物材料作为绝热材料,避免了表面牺牲层工艺和体加工技术,降低了成本、提高了成品率。在传统探测器结构基础上,在底部制备一层金属用作红外反射层,利用吸收层可以对红外辐射进行二次吸收。金属层和有源层间的隔离层对红外也有很好的吸收效果,由隔离层、有源层和钝化层构成三明治结构,可以显著改善对红外辐射的吸收。对器件的制备工艺进行了说明并对器件特性进行了测试,结果表明,在773K黑体源8～14μm红外辐射下,探测器的响应度最大为26.4kV/W,表明器件具有较高的性能。
Using polyimide as thermal insulation material, the structure of the traditional room temperature microbolometer was improved, and the amorphous silicon room temperature microbolometer was successfully prepared and tested. Polymer materials as a thermal insulation material, to avoid the surface of the sacrificial layer process and body processing technology, reduce costs and improve yield. Based on the traditional detector structure, a layer of metal is prepared at the bottom for the infrared reflection layer, and the infrared radiation can be secondarily absorbed by the absorption layer. The isolation layer between the metal layer and the active layer also has good infrared absorption effect. The sandwich structure formed by the isolation layer, the active layer and the passivation layer can significantly improve the absorption of infrared radiation. The fabrication process of the device was demonstrated and the characteristics of the device were tested. The results show that the responsivity of the detector is 26.4kV / W at 773K black body with 8 ~ 14μm infrared radiation, which indicates that the device has high performance.