1.前言 由于真空材料和真空技术的进步,已经能够比较容易地实现高真空和超高真空,但是伴随着高真空和超高真空的发展,以电离真空计为代表的所谓全压强计的指示值,因残余气体成分不同而进行变化,因此难以掌握正确的压强值。 另一方面,虽然以滤质器为代表的四极质谱计进行残余气 1. Introduction Due to advances in vacuum materials and vacuum technology, high vacuum and ultrahigh vacuum have been relatively easy to implement, but along with the development of high vacuum and ultrahigh vacuum, the so-called total pressure gauge, typified by an ionization vacuum gauge, Since the value varies depending on the residual gas composition, it is difficult to grasp the correct pressure value. On the other hand, although the quadrupole mass spectrometer typified by the mass filter performs the residual gas