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氦质谱检漏是目前比较广泛采用的一种泄漏检测方法,一般采用比对定量的方法给出检漏结果。本文分析了氦质谱检漏的影响因素,从建立数学模型角度分析漏率测量的不确定度,并给出采用氦罩法进行真空泄漏检测时的漏率不确定度范围,为用该方法评价氦质谱检漏结果提供思路,探讨采用该方法提供漏率结果不确定度的合理性和可行性。
Helium mass spectrometry leak detection is a widely used method of leak detection, and the method of comparison and quantification is generally used to give the leak detection result. In this paper, the factors that affect helium mass spectrometry leak detection are analyzed, the uncertainty of leak rate measurement is analyzed from the point of establishing mathematical model, and the range of uncertainty of leak rate in vacuum leak detection using helium hood method is given. Helium mass spectrometry leak detection results provide ideas to explore the use of this method to provide leakage rate uncertainty of the rationality and feasibility.