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研究了铌酸锂波导静态傅里叶变换微光谱仪分辨率的影响因素,并在此基础上提出了一种采用端面反射铌酸锂波导结构提高微光谱仪光谱分辨率的方法.该方法容许在减小铌酸锂波导静态傅里叶变换微光谱仪尺寸的同时,使两干涉臂间最大光程差增大1倍,从而使其光谱分辨率实现倍增.采用商业化铌酸锂波导电光调制器构建了一个傅里叶变换光谱仪原理样机,并对样机在不同波长下的光谱分辨率进行了测量,结果指出对调制器加载端面反射结构后获得的光谱分辨率是加载端面反射结构前的2倍,与理论分析结果完全一致.这种光波导端面反射结构制作工艺简单,易于实现,是一种提高集成光波导静态傅里叶微光谱仪分辨率的有效手段.
The influencing factors of the resolution of the LiNbO4 waveguide static Fourier transform spectrometer are studied, and a method to improve the spectral resolution of the spectrometer is proposed by using the end-reflected lithium niobate waveguide structure. Small LiNbO4 waveguide static Fourier transform micro-spectrometer size, while making the maximum optical path difference between the two interfering arms increased by 1 times, so as to achieve doubling of the spectral resolution.Used commercial lithium niobate waveguide light modulator to build A prototype Fourier transform spectrometer was used to measure the spectral resolution of the prototype at different wavelengths. The results showed that the spectral resolution of the modulator after loading the end-face reflective structure was twice that of the front-end reflective structure, Which is completely consistent with the theoretical analysis.The fabrication process of the optical waveguide end-face reflection structure is simple and easy to implement, and is an effective method for improving the resolution of the integrated optical waveguide static Fourier spectrometer.