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报道了对45°入射角高反的13.1nm软X射线多层膜反射镜的研制情况。利用在星光装置中进行的软X射线激光等离子体实验测量多层膜反射率的方法,获得了26.2%的实测反射率,该反射率已达到理论反射率的70%。
The development of a 13.1 nm soft X-ray multilayer mirror with a 45 ° incident angle is reported. The method of measuring the reflectivity of a multilayer film using a soft X-ray laser plasma experiment conducted in a starlight device resulted in a measured reflectivity of 26.2%, which had reached 70% of the theoretical reflectivity.