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介绍了用半导体激光器、单模光纤准直激光束作为测量基准轴线,四象限光电器件作为位置传感器,并由单片机进行数据采集、处理与测量结果显示的直线度准直仪。通过稳定性实验、重复特性实验和双频干涉仪比对实验,验证了本直线度测量系统的可行性。实验结果表明,测量系统实现的测量精度为(1.0+2×L)μm(L为准直距离,单位为m),测量范围为10m。
A straightness collimator with semiconductor laser, single-mode fiber collimating laser beam as measurement reference axis, four-quadrant photoelectric device as position sensor and data acquisition, processing and measurement results by single-chip microcomputer is introduced. Through the stability experiment, repeated characteristic experiment and dual-frequency interferometer comparison experiment, the feasibility of this straightness measurement system is verified. The experimental results show that the measurement accuracy achieved by the measurement system is (1.0 + 2 × L) μm (L is the collimation distance in m) and the measurement range is 10m.