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为了提升高功率固体激光器抽运光束的均匀性,研究了成像型和非成像型光束积分系统光束匀化机理。从光斑尺寸、最大入射角及光斑均匀性三个方面,详细对比了两种积分系统的性能特点。分析表明,成像型光束积分系统不但具有更好的匀化效果,相比非成像型还降低了对半导体激光器(LD)光束准直的要求,并且可调整微透镜阵列间距实现光斑尺寸的改变,拓展了系统应用范围。经实验测试,在照明范围内LD阵列光束经成像型积分系统后光斑不均匀性小于10%。
In order to improve the homogeneity of the pumped beam of high power solid-state laser, the beam homogenization mechanism of imaging and non-imaging beam integration system is studied. From the three aspects of the spot size, the maximum angle of incidence and the spot uniformity, the performance characteristics of two integral systems are compared in detail. The analysis shows that the imaging beam integration system not only has a better homogenization effect, but also reduces the requirement of collimating the semiconductor laser (LD) beam compared with the non-imaging type, and can adjust the spot pitch of the microlens to change the spot size, Expand the scope of system applications. The experimental test shows that the spot unevenness of the LD array beam is less than 10% after the imaging integral system in the illumination range.