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1前言光集成器件由于其综合成本低、体积小巧、易于大规模装配生产、工作速率高、性能稳定等等优点,早在20世纪70年代就引起了世人的关注和研究。在随后的三十多年里,随着光波导制作技术以及各种精细加工技术的迅速发展,光
1 Introduction Optical integrated devices have attracted worldwide attention and research since the 1970s due to their low overall cost, small size, ease of mass assembly, high operating speed, and stable performance. In the subsequent thirty years, with the optical waveguide fabrication technology and the rapid development of various fine processing technologies, the light