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亚微米阵列薄膜是以微/纳米尺寸的管、柱、弹簧等为基本单元,在同一平面内周期排列构筑的薄膜结构(厚度100 nm–1?m).亚微米阵列薄膜是人工合成的新型材料,需要依靠实验、理论和数值分析技术得到材料参数.由于亚微米阵列薄膜的几何微尺度,其固有频率达到MHz量级.本文提出了一种基于激光技术的非接触式振动测试方法,由振动特性确定了亚微米阵列薄膜弹性参数.
Submicron array thin film is a thin film structure (thickness 100 nm-1? M) arranged periodically in the same plane with micro / nano size tubes, columns, springs and the like as the basic unit. The submicron array thin film is a new type of artificial synthesis Material, it is necessary to rely on experimental, theoretical and numerical analysis techniques to obtain the material parameters. Due to the geometrical micro-scale of the sub-micron array film, its natural frequency reaches the order of MHz.This paper presents a non-contact vibration test method based on laser technology, Vibration characteristics determine the sub-micron array film elastic parameters.