以正硅酸乙酯(TEOS)为有机硅源,乙醇为溶剂,NH3.H20和HCl为催化剂,采用溶胶-凝胶技术,通过调节催化剂控制SiO2纳米颗粒尺度,然后在玻璃上用旋涂法镀膜并对其进行热处理,制备低折射率SiO2减反膜.分别采用椭偏仪和扫描电镜对所制备减反膜的结构、物性进行研究,研究不同性质和剂量的催化剂对薄膜结构、折射率的影响.结果表明:通过控制适量的碱酸催化剂可以制备出低折射率多孔结构的SiO2太阳电池减反膜. Using TEOS as organic silicon source, ethanol as solvent, NH3.H20 and HCl as catalyst, the size of SiO2 nanoparticles was controlled by adjusting the catalyst by sol-gel technique and then spin-coated on glass Coating and heat treatment to prepare low refractive index SiO2 antireflection film.The structure and physical properties of the prepared antireflection film were studied by ellipsometry and scanning electron microscopy respectively.The effects of different properties and dosage of catalyst on the structure of film, .The results show that the antireflective film of SiO2 solar cell with low refractive index and porous structure can be prepared by controlling the amount of alkali acid catalyst.