本文提出了两种测量悬空薄膜内应力的新方法：阈值电压法和长梁挠曲法．对两种方法进行了理论分析与实验验证，并与已有的应力测量方法进行了对比，取得了吻合的结果．这两种方法测试非常简单，且可实现薄膜内应力的＂片内＂检测．其中，阈值电压法既能测膜的张、压应力，也能提取材料的弹性模量，这使它成为一种非常有吸引力的应力测量方法． This paper presents two new methods to measure the internal stress of a suspended thin film: the threshold voltage method and the long beam deflection method. The theoretical analysis and experimental verification of the two methods are carried out. Compared with the existing stress measurement methods, the results are consistent. Both methods are very easy to test and enable “on-chip” inspection of stress in the film. Among them, the threshold voltage method can not only measure the membrane tension, compressive stress, but also extract the elastic modulus of the material, making it a very attractive stress measurement method.