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引言军用和民用两方面在可能范围内广泛应用热成象系统都对它们的经济和技术现实性十分注意。特别是采用比较新的半导体材料和现代工艺技术的探测器,其价格是整个系统价格的一个重要部分。随着高分辨率系统的发展,需要大量的小面积探测器单元,这使阵列制备的成本变得比原材料的成本更为重要。本文介绍了单片工艺的发展情况,这种工艺正用于制备30个以下的碲锡铅光电二极管的线性阵列。整个阵列上的峰值光谱
INTRODUCTION The wide application of thermal imaging systems, both military and civilian, to the extent possible, draws considerable attention to their economic and technical realities. In particular, detectors using relatively new semiconductor materials and modern process technologies are an important part of the overall system price. With the development of high resolution systems, a large number of small area detector cells are needed, which makes the cost of array preparation more important than the cost of raw materials. This article describes the development of a monolithic process that is being used to prepare a linear array of less than 30 tellurium-tin-lead photodiodes. Peak spectrum across the entire array