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本文报告的是利用准分子激光诱导湿刻和光刻技术相结合的方法,实现了对GaAs的图形转换。发现由GaAs表面的金膜、水溶液和GaAs构成的系统中,金膜不仅起了光掩蔽的作用,而且还起了促进刻蚀作用。结果说明这是一个电化学光电池结构。
This paper reports the use of excimer laser-induced wet etching and photolithographic techniques combined to achieve the conversion of GaAs graphics. It is found that the gold film not only plays a role of light-shielding, but also promotes the etching effect in a system composed of a gold film, an aqueous solution and GaAs on the surface of GaAs. The result shows that this is an electrochemical photocell structure.