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采用化学和物理方法分别在Hg1-xCdxTe(MCT)表面制备了阳极氟化膜、CdTe、ZnS和类金刚石薄膜(DLC)钝化层.采用俄歇光谱(AES)和红外透射光谱(IR)研究了这些钝化层与MCT之间的界面特性.结果表明:与阳极氟化膜和CdTe膜相比,ZnS和DLC膜能较好地抑制MCT组元的外扩散.ZnS层中的Zn和S易于向MCT内部扩散,而且发现在ZnS层中有O的存在,这可能是由于ZnS易与空气中水份发生作用所致.而DLC中C向MCT内表面扩散较少.MCT表面沉积DLC薄膜后红外透过率较ZnS有明显的提高.
Anodic fluorination films, CdTe, ZnS and diamond-like carbon (DLC) passivation layers were prepared on Hg1-xCdxTe (MCT) surfaces by chemical and physical methods. The interface characteristics between these passivation layers and MCT were studied by Auger spectroscopy (AES) and infrared transmission spectroscopy (IR). The results show that ZnS and DLC films can suppress the out-diffusion of MCT components better than the anodic fluoridation and CdTe films. Zn and S in the ZnS layer tend to diffuse inside the MCT, and it is found that there is O in the ZnS layer, which may be due to the ZnS susceptible to moisture in the air. However, the diffusion of C to the inner surface of MCT in DLC is less. The infrared transmittance of DLC thin film deposited on MCT surface is obviously higher than that of ZnS.