介绍了基于“魔镜”技术原理研制的镜面无损检测系统。该检测系统已应用于Si片和其他半导体抛光晶片的质量检测 ,且其用途已延伸到与超平镜面有关的各种技术领域 ,如硬盘、光盘、玻璃衬底等。 The mirror nondestructive testing system based on the principle of “magic mirror” is introduced. The inspection system has been used for the quality inspection of Si wafers and other semiconductor wafers, and its use has been extended to various technical fields related to ultra-flat mirrors such as hard disks, optical disks, glass substrates and the like.