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本文从高斯光束的波动方程出发 ,建立起相交区域的数学模型 ,从而推导出干涉花样沿着 X、Y、Z轴分布的空间频率表达式 ,通过数值计算讨论了对测量误差的影响。
Based on the wave equation of Gaussian beam, the paper establishes the mathematical model of the intersecting region and derives the spatial frequency expression of the interference pattern along the X, Y and Z axes. The influence on the measurement error is discussed by numerical calculation.