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为了防止活性等离子体对下层银膜的破坏,采用多晶TiO2半导体烧结靶,使用射频磁控溅射方法在纯氩等离子气氛中制备了大面积均匀的TiO2、Ag@TiO2薄膜。为了了解其结构与电子和光学特性间的相互作用,对TiO2和TiO2/Ag/TiO2样品的制备参数(如射频功率、总压和直流电压的共同影响)进行了研究。采用掠入射X射线衍射、紫外可见吸收、拉曼光谱等技术研究了根据其结构调整光学性能的可能性。结果显示,沉积的TiO2薄膜具有与在氩气和氧气混合气氛中沉积所得薄膜相似的形貌、电子和光学特性、能隙带宽和晶相;且所制备的Ag@TiO2薄膜银具有可逆的光致变色特性,可作为智能窗、多波长光存储器和可擦写高密度电子纸使用。
In order to prevent the active plasma from damaging the underlying silver film, a polycrystalline TiO2 semiconductor sintered target was used to prepare a large area uniform TiO2 and Ag @ TiO2 thin film in a pure argon plasma atmosphere by RF magnetron sputtering. In order to understand the interaction between the structure and the electronic and optical properties, the preparation parameters of TiO2 and TiO2 / Ag / TiO2 samples (such as RF power, total pressure and DC voltage) were studied. Grazing incidence X-ray diffraction, UV-Vis absorption, Raman spectroscopy and other techniques to study the possibility of adjusting optical properties according to their structure. The results show that the deposited TiO2 film has similar topography, electronic and optical properties, bandgap bandwidth and crystalline phase as those deposited in a mixed atmosphere of argon and oxygen; and the prepared Ag @ TiO2 film silver has reversible light Induced discoloration characteristics, can be used as a smart window, multi-wavelength optical memory and erasable high-density electronic paper use.