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利用热重分析(TG)对化学溶液法前驱体混合物的热分解过程进行研究,确定了预分解温度;利用X射线衍射(XRD)和原子力显微镜(AFM)对金属有机沉积法(MOD)合成的La2CuMnO6薄膜的相组成和形貌结构进行了表征。结果表明,选择合适的前驱体La(CH3COO)3.1.5H2O、Cu(CH3COO)2.1.0H2O、Mn(CH3COO)2.4.0H2O,在1000℃、保温时间3h、SrTiO3(STO)(100)、Ar-4%H2气氛及总离子浓度1.0mol/L的工艺条件下制备的La2CuMnO6薄膜具有很好的c轴织构,薄膜表面较平整、均匀、无裂纹、无孔洞,分布均匀且排列致密,完全满足缓冲层对薄膜的要求。
Thermal decomposition (TG) was used to study the thermal decomposition process of the precursor mixture by chemical solution method, and the pre-decomposition temperature was determined. The metal organic deposition method (MOD) was synthesized by X-ray diffraction and atomic force microscopy The phase composition and morphology of La2CuMnO6 films were characterized. The results show that SrTiO3 (STO) (100), Ar- (CH3COO) 2 .H2O, Cu (CH3COO) 4% H2 atmosphere and total ion concentration of 1.0mol / L prepared under the conditions of La2CuMnO6 film has a good c-axis texture, the film surface is relatively flat, uniform, no cracks, no holes, uniform distribution and compact arrangement, fully satisfied Buffer layer on the film requirements.