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描述了一种基于分子电子传感器(MET)技术的微型机械地震计的研制过程。不同于固体惯性质量,分子电子传感器地震计是探测液体电解质相对于固定电极的移动。使用微机电系统技术将探测单元的内部尺寸减小到1μm并且提高了设备的再现性。对600mV的工作偏置电压,在0.32Hz的400μg(g≡9.81m/s2)加速度条件下可测得灵敏度为809V/(m/s2)。在1Hz获得的噪声水平为-115dB(相对于(m/s2)/Hz~(1/2))。这项工作研发了一个可供选择小尺寸、高灵敏度、低本底噪声、高振动范围和独立安装角度的地震计设备。这有希望成为下一代行星探测用的地震仪。
The development of a miniature mechanical seismometer based on molecular electronic sensor (MET) technology is described. Unlike solid inertial mass, molecular-electronic sensor seismometers detect the movement of a liquid electrolyte relative to a stationary electrode. The use of MEMS technology reduces the internal dimensions of the detection unit to 1 μm and improves the reproducibility of the device. The sensitivity of 809V / (m / s2) was measured at a working bias voltage of 600mV at 400μg (g = 9.81m / s2) acceleration at 0.32Hz. The noise level obtained at 1 Hz is -115 dB (vs. (m / s2) / Hz ~ (1/2)). This work has developed a seismometer device with a choice of small size, high sensitivity, low noise floor, high vibration range and independent mounting angle. This is hopefully the seismograph for the next generation of planets.