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综合地介绍了类金刚石膜研究现状,着重说明了非晶碳类金刚石薄膜的摩擦学特性,分析了沉积方法、掺杂元素、摩擦环境、基体及对偶材料对其摩擦学特性的影响。最后,简要说明了非晶碳类金刚石膜应用情况。
The research status of DLC films is introduced comprehensively. The tribological properties of DLC films are emphatically explained. The influence of deposition method, doping elements, tribological environment, matrix and dual materials on the tribological properties are analyzed. Finally, a brief description of the amorphous carbon diamond film applications.