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对双飞秒激光绝对距离测量系统的测量精度进行了分析,主要包括激光器量子噪声、重复频率稳定性和数据采集与处理误差等因素的影响。通过建立双飞秒激光等效采样的物理模型并与实验对比,得出各因素对测距精度影响的大小和特点。结果表明,典型飞秒激光器量子极限的时间抖动对测距精度能产生10μm量级的影响;激光器重复频率稳定性引入的测距误差为10-10×L(L为待测距离);数据采集与处理过程对测量精度有百nm的影响。通过对以上各因素的分析和评价,可为双飞秒激光测距系统及类似测距系统测量精度的改善提供依据。
The measurement accuracy of dual femtosecond laser absolute distance measurement system is analyzed, including the influence of laser quantum noise, repetition frequency stability, data acquisition and processing error and so on. Through the establishment of double femtosecond laser equivalent sampling physical model and compared with the experiment, the factors that affect the accuracy of ranging accuracy and size characteristics. The results show that the typical jitter of the typical femtosecond laser can affect the range precision to 10μm. The range error introduced by the laser repetition rate stability is 10-10 × L (L is the measured distance). The data acquisition With the process of measuring the accuracy of a hundred nm impact. Through the analysis and evaluation of the above factors, it can provide the basis for improving the measuring accuracy of dual femtosecond laser ranging system and similar ranging system.