根据衍射光学束匀滑器件透过率函数的自相关系数,重新定义了表征衍射光学器件(DOE)焦面光强分布束匀滑性能的两个参数:光能利用率和顶部不均匀性。此种定义是对利用衍射光学器件焦面光强分布的空间频谱进行的性能参数定义的一种近似,对于精细化设计,两种定义计算结果非常吻合;而对于传统设计,两种定义计算结果有较大偏差。当衍射光学束匀滑器件与光谱色散平滑(SSD)技术联合使用时,模拟计算结果表明,对于精细化设计与传统设计,定义的性能参数均能反映衍射光学器件的实际使用性能。 According to the autocorrelation coefficient of the transmittance function of the diffractive optical beam smoothing device, two parameters that characterize the smoothness of DOF focal light intensity profile are redefined: the light energy utilization and the top inhomogeneity. This definition is an approximation to the definition of the performance parameters of the spatial spectrum using the focal plane intensity distribution of the diffractive optics. For the refinement design, the two definitions are in good agreement with each other. For the traditional design, Big deviation. When the diffractive optical beam smoothing device is used in combination with the spectral dispersion smoothing (SSD) technique, the simulation results show that the performance parameters defined for the refined design and the traditional design all reflect the actual performance of the diffractive optical device.