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设计了一种高效的、基于多模干涉(MMI)的椭圆型十字光波导,通过增加模式匹配器和调整自聚焦点位置,降低其传输损耗。COMSOL仿真表明该波导在1550nm波长处的透射率高达96.5%,串扰损耗小于2×10-5,而传统的椭圆型十字波导的透射率仅为91.2%。并且对椭圆型MMI的成像规律进行了理论分析和仿真验证,结果表明这种新型椭圆型结构不但在1550nm处表现出高效性,对整个1500~1600nm的通信波段都具有非常低的损耗(小于0.2dB)和串扰(小于-42dB)。这种十字光波导尺寸小、结构简单,只需要在硅上绝缘体(SOI)基底材料上融刻一次即可实现,制备工艺简单,有利于节约成本和批量生产,广泛适用于未来的集成光路。
An efficient elliptical cross waveguide based on multimode interference (MMI) is designed to reduce the transmission loss by adding pattern matching and adjusting the position of self-focusing point. COMSOL simulation shows that the waveguide has a transmittance of 96.5% at a wavelength of 1550 nm and a crosstalk loss of less than 2 × 10 -5, while the conventional elliptical cross waveguide has a transmittance of only 91.2%. The theoretical analysis and simulation of the imaging law of elliptical MMI show that the new elliptical structure not only shows high efficiency at 1550nm but also has very low loss (less than 0.2 dB) and crosstalk (less than -42dB). The cross light waveguide has the advantages of small size and simple structure, and only needs to be fused and etched once on the silicon-on-insulator (SOI) substrate material. The preparation process is simple, is conducive to cost saving and mass production, and is widely applicable to the future integrated optical path.