激光诱发前向转印(LIFT)技术作为微加工的一种手段,具有制备微小结构的能力,目前已经成为微细加工领域的研究热点。通过改变高斯分布的激光聚焦位置,进行了Cu薄膜在石英玻璃表面的转印实验,并对转印沉积薄膜进行了光学显微镜、扫描电子显微镜(SEM)和能量弥散X射线(EDX)等分析,探讨了激光散焦距离与沉积薄膜的尺寸、形貌以及厚度均匀性的关系,并在此基础上研究了转印薄膜形貌发生变化的机理。研究结果表明,随着激光光斑离焦距离的增大,转印图形的尺寸先增大后变小,直至消失。转印Cu薄膜的形态从环形或火山形,转变为圆形,并且圆形薄膜的边缘存在大量微小的Cu颗粒。薄膜的转印形式也由开始的液态转印向固态转印演变。 Laser-induced forward transfer (LIFT) technology as a means of micro-processing, with the ability to prepare small structures, has now become the focus of the field of micro-processing research. The transfer experiment of Cu thin film on the surface of quartz glass was carried out by changing the laser focus position of Gaussian distribution. The optical microscope, scanning electron microscope (SEM) and energy dispersive X-ray (EDX) The relationship between the laser defocus distance and the size, shape and thickness uniformity of the deposited films was discussed. Based on the results, the mechanism of the change of the morphology of the transferred films was also studied. The results show that with the increase of the defocus distance of the laser spot, the size of the transfer pattern first increases and then decreases until it disappears. The shape of the transferred Cu film changed from a ring shape or a volcano shape to a round shape, and a large number of minute Cu particles were present at the edges of the circular film. The transfer form of the film also evolved from the initial liquid transfer to solid state transfer.